Applications
High Temperature
Thermally stable FFKM sealing for furnaces and thermal processing, with grades qualified for continuous service to 320 °C.
What goes wrong
- Compression set accelerates above 250 °C, causing leakage
- Repeated thermal cycling hardens conventional elastomers
- High-temperature processes also demand low outgassing
Process steps
Diffusion and thermal oxidationRTP and epitaxyFurnace and oven sealing
Equipment
Thermal process chambersFurnace doors and sealsExhaust and gas linesLamp and heater assemblies
Grades we would start from
OME7505
75 Shore A · -10 to +320 °C
Grade dataOMS7102
75 Shore A · -10 to +300 °C
Grade dataOMS7503
70 Shore A · -10 to +275 °C
Grade dataWhere each grade fits
- OME7505 — up to 320 °C continuous service
- OMS7102 — up to 300 °C with low metal-ion content
- OMS7503 — 17 % compression set for dry-etch and strip
Other environments
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Discuss a high temperature application
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